Some codings for the first symbols:
\documentclass{scrartcl}[10pt,ngerman]
\usepackage{tikz}
\usetikzlibrary{shapes.multipart, shapes.geometric}
%
\usepackage{array}
%
\newcommand{\vsmIndustry}[2][Customer]{
\node[rectangle, minimum width=3cm, minimum height=1cm] (#1) at (#2) {#1};
\draw (#1.south west) -- (#1.south east) -- (#1.north east) --++
(0,5mm) --++ (-1cm,-5mm) --++ (0,5mm) --++ (-1cm,-5mm) --++ (0,5mm) --
(#1.north west) -- cycle;
}
%
\newcommand{\vsmInventory}[3][Inventory]{
\node[draw, regular polygon, regular polygon sides=3, minimum height=1.5cm, label={[label distance=1em]270:{\footnotesize #3}}] (#1) at (#2) {I};
}
%
\newcommand{\vsmDataBoxFour}[6][DataBox]{
\node[draw, shape=rectangle split, rectangle split parts=4, rectangle split part align={left}, minimum width=3cm, font=\vphantom{Q}\tiny] (#1) at(#2) {P/T: #3 \nodepart{two} L/T: #4 \nodepart{three} Staff avail.: #5 \nodepart{four} C/O: #6};
}
%
\newcommand{\vsmProcess}[4][Process]{
\node[draw, , text width=3cm, shape=rectangle split, rectangle split parts=2, rectangle split part fill={black!10,white}, font=\vphantom{Q}] (#1) at(#2) {\textbf{#3} \nodepart{two} #4};
}
%
\newcommand{\vsmWorkcell}[3][Workcell]{
\node [minimum width=3em, minimum height = 3em, label={[label distance=0.5em]90:{\footnotesize #3}}] (#1) at (#2) {};
\draw (#1.south west) -- (#1.north west) -- (#1.north east) -- (#1.south east) -- ++(-1em,0) -- ++(0em,2em )-- ++(-1em,0) -- ++(0,-2em) -- cycle;
}
%
\begin{document}
% \usepackage{array} is required
\begin{tabular}{>{\centering\arraybackslash}p{3cm}p{10cm}}
Symbol & Code \\ \hline
\begin{tikzpicture}
\vsmWorkcell[Zelle1]{0,0}{Text above}
\draw [draw=red, fill=red] (Zelle1) circle(1pt);
\end{tikzpicture} &
\verb|\vsmWorkcell[Node-Name]{Pos}{Text above}|
\\[4ex] %\hline
\begin{tikzpicture}
\vsmProcess[Process]{0,0}{Process}{description \\ line 2}
\draw [draw=red, fill=red] (Process) circle(1pt);
\end{tikzpicture} &
\verb|\vsmProcess[Node-Name]{Pos}{process}{description}|
\\[4ex] %\hline
\begin{tikzpicture}
\vsmDataBoxFour[Data1]{0,0}{10 min.}{20 min.}{7,5 h a day}{30 min.}
\draw [draw=red, fill=red] (Data1) circle(1pt);
\end{tikzpicture} &
\footnotesize \verb|\vsmProcess[Node-Name]{Pos}{value P/T}{value L/T}{value staff avail.}{value C/O}|
\\[4ex] %\hline
\begin{tikzpicture}
\vsmIndustry[Supplier]{0,0}
\draw [draw=red, fill=red] (Supplier) circle(1pt);
\end{tikzpicture} &
\verb|\vsmIndustry[Node-Name]{Pos}|
\\[4ex] %\hline
\begin{tikzpicture}
\vsmInventory[Storage1]{0,0}{1.000 pcs.}
\draw [draw=red, fill=red] (Storage1) circle(1pt);
\end{tikzpicture} &
\verb|\vsmProcess[Node-Name]{Pos}{pieces}|
\\[4ex] %\hline
\begin{tikzpicture}
\draw [draw=red, fill=red] (0,0) circle(1pt);
\end{tikzpicture} &
Red dot stands for anchor of the node
\\[4ex] %\hline
\end{tabular}
%
\end{document}
Result:
